The effect of film composition, sputtering process parameters, substrate material and its temperature, film thickness and specification of heat treatment were discussed to realize the magnetic property control of sputtering amorphous films.
为了达到控制溅射非晶态薄膜磁性的目的,从溅射非晶态薄膜的组成成分、溅射工艺参数、基体材料及温度、膜层厚度和镀后热处理工艺等几方面论述了影响非晶态溅射薄膜磁性的因素,结果表明,薄膜组成、膜厚、基材、溅射工艺及镀后热处理对溅射非晶态薄膜的磁性有较大的影响,应根据不同磁性要求加以控制。
The preparing method of ferromagnetic amorphous ribbon, which is the main functienal component of the magneto mechanical resonant marker, is introduced in this paper.
介绍了用于磁机械共振型传感器的主要功能元件——非晶态铁磁薄带的制备方法 ,从理论上分析了各因素对非晶态铁磁薄带的磁机械耦合系数的影响 ,并对其进行了测量。
In this paper,amorphous ZnO thin film was prepared by sol-gel method on glass substrate in order to study optical properties.
采用溶胶-凝胶法在玻璃衬底上制备了非晶态ZnO薄膜。
Nb Amorphous Metal Oxide Films XPS Analysis and The Mechanism of Photoluminescence
Nb金属氧化物非晶态薄膜的XPS分析及光致发光机理
High sputtering power produces an amorphous Cr-N film.
过高的溅射功率使薄膜以非晶态的形式存在。
Experimental Study of Internal Friction of a-Si:H Films Charged with Hydrogen
氢化非晶态硅薄膜的渗氢内耗实验研究
Technology Research of Photo-induced Effects in As-s Amorphous Semiconductor Films;
硫化砷非晶态半导体薄膜的光致效应技术研究
The Study on Photocatalytic Properties of Amorphous TiO_2-Ag (Mo) Thin Films Deposited by Magnetron Sputtering;
磁控溅射非晶态TiO_2-Ag（Mo）薄膜的光催化性能研究
Preparation and Photocatalytic Study on Amorphous TiO_2-Cr(V) Thin Films;
非晶态TiO_2-Cr（V）薄膜的制备及光催化性能研究
Praparation and Study on Photocatalytic Properties of TiO_2: W Thin Films;
非晶态TiO_2：W薄膜的制备及光催化性能的研究
Microstructure and Mechanical Properties of Amorphous Carbon Nitride Thin Films;
非晶态碳氮薄膜的微观结构与力学性质
Photoluminescence of Amorphous Niobium Oxide Film in Visible Light Area
非晶态Nb氧化物纳米薄膜可见光区的光致发光
Deactivation and regeneration of amorphous TiO_2/WO_3 films in photocatalysis
非晶态TiO_2/WO_3光催化复合薄膜的失活与再生
Research and Progress in Transparent Amorphous Oxide Semiconductor Thin Film Transistors
透明非晶态氧化物半导体薄膜晶体管的研究进展
Fabrication of P-type Amorphous Silicon Thin Films and Poly-Silicom by PECVD;
PECVD法制备P型非晶硅薄膜及多晶硅薄膜
Metal-Induced Crystallization of Amorphous Silicon and Silicon Germanium Films
非晶硅和非晶硅锗薄膜的金属诱导结晶
Influence of FeCo-rich Crystallites on the Magnetic Properties of Amorphous TbFeCo Thin Films
富FeCo晶粒对非晶TbFeCo薄膜磁特性的影响
Effect of Thickness on Magneto-optical Properties of GdTbFeCo Thin Films
膜厚对GdTbFeCo非晶薄膜磁光性能的影响
Preparation of Amorphous Silicon Nitride Film by ECRCVD;
用电子回旋共振化学气相沉积(ECRCVD)方法制备非晶态氮化硅薄膜
Study on the Photocatalytic Properties of TiO_2/WO_3 Compouding Flims
非晶态TiO_2/WO_3复合薄膜光催化活性的影响因素研究
Approach to Semi-fixed Abrasive Grinding Plate on Surface Lapping Copper Substrates of Amorphous Ni-Pd-P Alloy Films
半固着磨具在非晶态Ni-Pd-P合金薄膜铜片衬底精密研磨中的应用