The characteristics of thick resist lithography technique different from those of traditional technique are analyzed on the principle of lithography process and computer simulations.
厚层抗蚀剂光刻是一种制作深浮雕结构的微细加工技术。
: During the fabrications of MEMS with thick resist lithography technique, most elements need better line width and vertical sidewall, so rigorous control of exposure dose and development time is necessary to get better patterns.
DILL曝光模型和MACK显影模型,编制了接触式曝光系统的厚层抗蚀剂光刻模拟软件,用其分析在理想曝光剂量条件下,抗蚀剂显影后的线宽和侧壁陡度随显影时间的变化规律,分析得出了给定厚度的抗蚀剂的显影时间,为实验工艺上严格控制显影时间提供依据。
Recently, lithograph of thick resist has been regarded as an effective and economical technology for manufacturing excellent high-aspect-ratio microstructures (HARMS).
近年来，作为制作优质大高宽比微结构的厚层抗蚀剂光刻术以其工艺简单、制作成本低等优点受到国际上广泛重视。
Considered the nonlinear factors existing in the exposure process of thick photoresist,an enhanced Dill model for thick photoresist is proposed,which improves the original Dill model and modifies the definition of Dill exposure parameters.
针对厚层抗蚀剂曝光过程中存在诸非线性因素的影响,更新Dill曝光参数的定义,建立了适合描述厚层抗蚀剂曝光过程的增强Dill模型。
The film thickness uniformity is an important reflection of the film quality and the device performance.
在自行设计的磁控溅射沉积设备上,对薄膜沉积工艺中靶基间距、溅射功率、工作气压对膜厚均匀性的影响进行了研究,由连续光谱椭圆偏光仪SE800测量薄膜厚度。
To improve the thickness uniformity of thin films deposited by magnetron sputtering process,the substrate is rotated off its axis in relation to magnetron target.
溅射原子的角分布、溅射环的宽度以及膜厚均匀性要求都会影响该线性关系。
Film thickness uniformity used in big area optical film for outdoor lighting is required higher.
采用平面公自转行星夹具镀制户外照明用大面积光学薄膜,分析计算了光学薄膜膜厚的均匀性,探讨各个参数对膜厚均匀性的影响,经测试分析,得到理论偏差和实际偏差结果。
Studies on Optical Constants and Thickness Uniformity of the Laser Thin Films;
激光薄膜光学常数和膜厚均匀性的研究
Research on Film Thickness Uniformity of Sputtering Deposition on Planar Substrate
平板基片溅射镀膜的膜厚均匀性研究(英文)
Study on Thickness Distribution Uniformity Control of Soft X-ray Multilayer Mirrors;
软X射线多层膜膜厚分布均匀性控制研究
⑧ while complicated with ascites,the peritoneum would incrassate evenly and the echo will be enhanced.
(8)合并腹水时 ,可见腹膜均匀性增厚 ,回声增强。
The thickness uniformity of films deposited by planar magnetron sputtering target was analyzed theoretically.
从理论上分析了平面磁控溅射靶沉积薄膜的厚度均匀性。
The preparation parameters were investigated by evaluation of the film coating thickness and uniformity.
以薄膜包衣厚度和均匀性为指标,考察包衣工艺参数。
Influence of Digging Effect on Films Thickness Uniformity for Electron Beam Evaporating onto Sphere Jig
挖坑效应对球形夹具下电子束蒸发沉积薄膜厚度均匀性的影响
Possess certain rigidity, hardness and elasticity, with unifor thickness.
具有一定的刚性，硬度和弹性，厚薄均匀。
POF, economical and practical, has high tenacity, light weight and even thickness.
韧性强,重量轻,厚度均匀,经济实用.
IMPROVEMENT OF THICKNESS UNIFORMITY OF STEEL STRIP WITH STEP ROLLS
用梯形辊轧制提高带钢厚度的均匀性
An Investigation on the Polymer Precision Extrusion and Uniformity of Wall Thickness;
高聚物精密挤出及其制品壁厚均匀性的研究
Structural Behavior of Tapered Steel Storage Tanks under Measured Differential Settlement;
变壁厚钢储罐在实测不均匀沉降下的结构性能
Control of Uniforming Compositions for the Large Thickness Joints of the Titanium Alloy
厚板钛合金电子束焊缝的成分均匀性控制
Experimental Study on Deformation Uniformity in Thickness Direction of 2205 Duplex Stainless Steel during Hot Rolling
2205双相不锈钢热轧厚向变形均匀性的实验研究
Thickness Homogeneity Control Technology for Aluminum Alloy Conical Parts
铝合金锥形挤压件厚度均匀性控制技术
The Controlling of Temperature Uniformity in Accelerate Cooling Control for Medium Plate
中厚板快速冷却过程中的温度均匀性控制
Effect of the Uniformity of Temperature Field on the Properties of CdTe Films and Solar Cells
温场均匀性对CdTe薄膜及太阳电池性能的影响
The main complication was edema of cornea epithelial and endothelial.
手术主要并发症是均匀的弥漫性的角膜水肿。