Particle Contamination and System Reformation in End Station of Ion Implanter;
离子注入机靶室尘埃污染与系统改造
Vertical scanner is the supporting part of a series process ion implanter, which transfer high speed movement from outside of the chamber to the target inside.
垂直扫描机构是单晶片离子注入机靶盘的支撑部件,起着将高速直线运动从靶室外传递到靶盘的作用。
Introduced the configuration of typical ion implanter,analyzed the importance of the implantation mechanical scanning technology.
简单介绍了典型离子注入机的组成,分析了离子注入机中扫描技术的重要性。
Seamless Transferability of Doping Processes Between the Ⅶsta Platform of Ion Implanters;
离子注入机Ⅶ Sta平台向掺杂工艺的无缝可变换性(英文)
The first accelerator-TEM interface system in China has been established at Wuhan University,which consists of a Hitachi H800 TEM,a 200 kV ion implanter and a 2×1.
7 MV串列加速器、1台200 kV离子注入机和1台200 kV透射电镜组成,通过自行设计的传输系统实现联机。
Generic specification for ion implantation equipment
GB/T15862-1995离子注入机通用技术条件
Design of the Large Tilt Ion Implanter Control System Software
大角度离子注入机控制系统软件设计
Design of the Vertical Scanner for the Large Tilt Angle Ion Implanter;
大角度离子注入机垂直扫描机构的设计
Study of High-current Oxygen Ion Implanter High Temperature Rotation Scanning Target;
强流氧离子注入机高温旋转扫描靶的研究
mos ion implantation
mos结构离子注入
STUDY ON MECHANISM OF DIELECTRIC LOSS OF ION-IMPLANTATED POLYMERS
离子注入聚合物介质损耗机理的研究
Research on Antibacterial Mechanism for Ion Implantation of Cu to A304 Stainless Steel
Cu离子注入A304不锈钢抗菌机理研究
A Study of Physical Mechanisms for Implanted Heavy Ions with Low Energies in Colorful Cotton Seeds;
低能重离子注入彩棉种子物理机制的研究
Sufrace Alloying Mechanism During Metal Ion Implantation into Metal at Elevated Temperatures;
金属离子高温注入金属表面合金化机制研究
The Study on Mutagenic and Mechanism of the Ion Beam on Arabidopsis Thaliana;
低能离子注入拟南芥的诱变效应和机理研究
Study on the Irradiation Effects and Mechanism after Nitrogen Ion Implanting into Cotton (Gossypium HirsutumL.) Pollen;
陆地棉花粉氮离子注入诱变效应及机理研究
bipolar ion implantation
双极型掐用离子注入
implant masking step
离子注入用掩蔽工序
high output implanter
高功率离子注入装置
rod plasma injector
棒状等离子体注入器
ion implantation gate MOS integrated circuit
离子注入ＭＯＳ集成电路
ion implanted fet
离子注入场效应晶体管
ion implanted base transistor
离子注入基极晶体管