Two different techniques to fabricate nano scale reference materials are investigated in detail: AFM tip induced local surface oxidation on Si substrate and mechanical modification of Au film with an AFM tip.
提出了两种制备纳米结构样板的方法 :Si基底上的原子力显微镜 (AFM )探针诱导阳极氧化工艺和Au膜上的AFM探针机械划刻工艺 。