SiHCl_3

GC method for detemining trace SiHCl_3 in high purity SiCl_4 has been developed.

采用石英毛细管柱与氩检测器相联结的气相色谱方法定量检测高纯的光纤原料四氯化硅中微量三氯氢硅等含氢杂质。