As one of promising interlay dielectrics used in the future ULSI, fluorinated amorphous carbon film (a-C: F) has been attracted intensively.
利用静电探针和光强标定的发射光谱(AOES)研究了CHF_3、CHF_3／C_6H_6气体ECR放电等离子体的特性及氟化非晶碳薄膜(a-C：F)的结构与等离子体空间基团分布的关系。
Influence of Deposition Temperature on the Structure & Properties of a-C: F Films;
沉积温度对氟化非晶碳薄膜结构和性质的影响
Effects of Nitrogen Doping on Microstructure of Fluorinated Amorphous Carbon Thin Films
氮掺杂对氟化非晶碳薄膜微观结构的影响
Growth and Characterization of Amorphous Fluorinated Carbon Films by Inductively Coupled Plasma Chemical Vapor Deposition
ICP-CVD制备氟化非晶碳(a-C:F)薄膜的研究
Electrical Properties of Nitrogen Doping Fluorinated Amorphous Carbon Thin Films;
含氮氟化非晶碳(a-C∶F∶N)薄膜电学性能的研究
The Preparation and Properties Research of Fluorinated Amorphous Carbon Films;
氟化非晶态碳膜的制备及其性能研究
Blood-compatibility of La_2O_3 Doped Amorphous Carbon Film
氧化镧掺杂非晶碳薄膜的血液相容性
Influence of Doping on Field Emission of Amorphous Carbon Thin Films
掺杂对氟化非晶碳膜场发射性能的影响
Thermal Annealing Effects on the Optical Properties of Amorphous Silicon Carbide Films;
非晶碳化硅薄膜光学特性的热退火效应
Studies on Preparation by HFCVD and Wettability of Amorphous Carbon Films;
HFCVD制备非晶碳薄膜及其润湿性的研究
Structural Evolution and Properties of Amorphous Silicon-Carbon Thin Films Deposited by Micro-wave Electron Cyclotron Resonance Plasma;
微波电子回旋共振法沉积的非晶碳化硅薄膜结构和性能研究
Microstructure and Mechanical Properties of Amorphous Carbon Nitride Thin Films;
非晶态碳氮薄膜的微观结构与力学性质
Preparation and Properties of a-GaN Films and Alignment of CNTs by LB Technique
非晶GaN薄膜的制备及性能和碳纳米管的LB排布
First-Principles Study of Vibrational Raman Spectra of Amorphous Carbon
非晶碳薄膜振动拉曼光谱的第一性原理研究
X-ray Photoelectron Spectroscopy Analysis of α-CN_x Films
非晶碳氮薄膜的X射线光电子能谱研究
Structure and Properties Study on Laser Crystallization of Amorphous TiO_2 Thin Film;
激光晶化二氧化钛非晶薄膜组织与性能研究
Research Progress on the Hydrogen Content Control of Hydrogenated Amorphous Silicon Thin Films
氢化非晶硅薄膜H含量控制研究进展
Optical properties of amorphous GaN films deposited by sputtering
溅射制备非晶氮化镓薄膜的光学性能
Deposition and Growth Mechanism of Crystalline Carbon Nitride Thin Films;
晶态氮化碳薄膜沉积及其生长机理研究