In this paper, the relation expression between pressure and interference light intensity is illustrated in MEMS pressure sensor, with MEMS pressure sensor explained by adopting Fabry-Perot cavity theory model.
推导出光纤MEMS压力传感器中硅横膈膜受到的压力与干涉光强的关系表达式 。
Demodulate modulation signal of laser interferometer in time domain;
一种时域解调激光干涉仪调制信号的方法
Comparison of the measurement methods between renishaw and doppler laser interferometer;
雷尼绍与多普勒激光干涉仪测量方法比较
Application of laser interferometer in the displacement sensor auto-testing;
激光干涉仪在位移传感器自动检定中的应用
Since both the measuring range and the resolution of a traditional grating interferometer were difficult to be improved simultaneously, a grating interferometry based on a single long metrology grating was presented.
针对传统光栅干涉仪中测量范围和分辨率难以同时提高的问题,提出利用单根大长度、低线数光栅实现大量程、高分辨率位移测量的方法。
Through calibration,nano-repeatability error of grating interferometer mea.
提出了一种新型的激光衍射光栅干涉仪测量系统,以光栅衍射原理和偏振光学为理论基础,配合正交信号的解相位细分原理,使得该系统可以达到纳米级分辨率。
The principle and the method for producing concave gratings through incoherently illuminated grating interferometers are presented.
本文给出利用非相干照明光栅干涉仪制造凹面衍射光栅的基本原理和方法,并报告初步实验结果。
Study on dynamic scanning characteristics of wavelength scanning fiber optic interferometer;
波长扫描光纤干涉仪动态扫描特性的研究
By theoretical and mathematical analysis of the output signal of laser intensity of a fiber optic interferometer,the characteristics and function of the signal are demonstrated essentially.
为解决干涉型光纤传感器的相位漂移问题,通过对双光束光纤干涉仪输出光强信号的理论分析和数学推导,阐述了信号各种成份的特点和作用,设计出基于反馈控制稳定工作点的干涉仪解调方案。
A new wavelength scanning fiber optic interferometer for absolute distance measurement was proposed.
介绍了一种新的可用于绝对距离测量的波长扫描光纤干涉仪，建立了测量系统及波长扫描的模型，分析了波长扫描的随机漂移对测量的影响，提出了对光源扫描性能的要求。
CO^2 laser interferometer
二氧化碳激光干涉仪
pulsed submillimeter laser interferometer
脉冲亚毫米波激光干涉仪
Research on Measurement of Roundness Error Based on the Laser Interferometer
基于激光干涉仪的圆度误差检测研究
Research and Development of Highly Accurate Laser Interferometer Based on DSP
基于DSP的高精度激光干涉仪的研制
laser image-speckle interferometer
激光影像-斑点干涉仪
multiple beam lateral-shear interferometer
多光束横向切变干涉仪
infrared prism interferometer-spectrometer
红外棱镜干涉光谱仪
three laser intercavity interferometer
三激光器内腔干涉仪
Temporal and spatial coherence, two-beam and multiple-beam interference, interferometers.
4时间与空间同调，二至多道光干涉，干涉仪。
The light is resolved by prisms, gratings, or by an interferometer.
光线用棱镜、光栅或干涉仪分解。
Study on Laser Ultrasound Detecting with Fiber Interferometer;
基于光纤干涉仪的激光超声检测研究
This grating interferometer uses grating as beam splitter, and behind the grating two beams interfere with each other.
本光栅干涉仪用光栅作为分束器,使双光束发生干涉。
pulsed He-Ne laser planeplate interferometer
脉冲氦氖激光平板干涉仪
Study on Mach-Zehnder Interferometer and Phase Compensation of All-Fiber Mach-Zehnder Interferometer;
光纤Mach-Zehnder干涉仪及其相位补偿的研究
Research on Laser-interference Profilometer with Large Range for Surface Measurement;
激光干涉式大量程表面轮廓仪的研制
The Study of Interferometer Spectrometer Based on DSP;
基于DSP技术的干涉光谱仪的研究
Study on Optical DPSK Modulation and Stability of MZ Interferometer;
光DPSK调制及MZ干涉仪稳定性的研究
Study of the Wind Lidar Based on Fizeau Interferometer;
基于Fizeau干涉仪的测风激光雷达的研究