Research on a Photolithography with LCD Real-time Masks;
液晶实时掩膜光刻技术研究
According to the demand of high data density of IC devices,higher photolithography resolution is required.
光学光刻技术在微细加工和集成电路(IC)制造中一直是主流技术。
The Status and Future of Lithography and It s Application;
光刻技术及其应用的状况和未来发展
This paper has provided auto-focus method of semiconduct photo lithography on Digital Image Processing ,using arithmetic of digital image processing realize auto-focus .
提出了基于图像处理的半导体光刻技术自动调焦的方法,利用图象处理算法实现半导体光刻技术的自动调焦。
This paper highlights the main challenges of IC technology sca ling in deep sub-micron and nanometer, which come from lithography, transistor scaling, sub-threshold leakage, interconnect scaling, power dissipation, platfo rm integration etc.
文中分析了按比例缩小在光刻技术、器件的亚阈特性、互连延迟以及功耗等方面面临的一些问题 ,同时从工艺、器件、电路、设计等方面提出一些相应的解决方
scaled down lithography
按比例缩小光刻技术
Study on Laser Interferometric Lithography Technology Based on Multi-beam Interference;
基于多光束相干的激光干涉光刻技术研究
Fundamentals and Lithographie Technology Based on Pulse Laser Exposing SU-8 Photoresist;
脉冲激光曝光SU-8胶的基础与光刻技术研究
Research on Electron Beam Nanolithogrpahy Based on AFM;
基于AFM的电子束纳米级光刻技术研究
Trends of Lithography Technology Based on Decreasing of the Feature Size
从特征尺寸的缩小看光刻技术的发展
Study of ArF Immersion Lithography and Development of Optical Lithography Simulator;
ArF浸没式光刻技术研究及光刻仿真辅助设计软件开发
The research results show that IIL can get the high resolution more effectively than conventional optical lithography (OL).
研究结果表明，掩模投影成像干涉光刻技术比传统投影光刻能够得到更高的光刻分辨率。
Study on Micro Transfer Molding of Soft Lithography in Micro Total Analysis Systems;
微全分析系统中微传递成模软光刻技术研究
Diffraction Spatial Imaging by Using the Technology of Consecutive Variable-pitch Dot Matrix Grating;
用于衍射空间成像的连续变空频干涉光刻技术
Controllable Synthesis of Ordered ZnO Nanodots Arrays by Nanosphere Lithography;
用纳米球类光刻技术可控制备ZnO纳米点的研究
Study on Key Technologies in UV-LED Fiber Lithography System
紫外LED光纤光刻系统关键技术研究
Investigation on Extreme Ultraviolet Lithography;
极紫外投影光刻中若干关键技术研究
Lithography Study of UV-LIGA Technology;
UV-LIGA技术光刻工艺的研究
Study on Real-time Focusing Technology for High-precision Lithography on Curved Surface;
高精度曲面光刻实时调焦技术的研究
High-Frequency Pulse Solid-State Laser Deep Engraving Technology Research
高频率脉冲固体激光深雕刻技术研究
Reformation of Computer Room Using PXE Net Ghost Technique to Save CD-ROM Drive
应用PXE网刻技术进行机房改造赚光驱
Focused Ion Beam Milling of Photonic Crystals in Bulk Silicon
FIB技术在硅基上刻蚀光子晶体的研究
CD-burning Technology in the Multimedia Technology Experimental Teaching
光盘刻录技术在多媒体技术实验教学中的应用