For fabricating X-ray mask of high line-density X-ray transmission gratings,the field stitching of E-beam lithography was analyzed when patterning high line-density gratings;by using pattern correction and low sensitive 950 k PMMA resist,the proximity effect of electron beam was effectively depressed when exposing thick resist spun on polyimide membrane.
为了制备高线密度X射线透射光栅掩模,分析了电子束光刻中场拼接对高线密度光栅图形的影响;利用几何校正技术和低灵敏度的950 k的PMMA电子束抗蚀剂,克服了电子束的邻近效应对厚胶图形曝光的影响。
The manufacture of high-line-density X-ray transmission gratings for X-ray spectroscopy by using electron beam lithography and X-ray lithography was reported.
针对X射线透射光栅摄谱仪中的高线密度光栅,研究了采用电子束曝光和X射线曝光技术结合制作高线密度X射线透射光栅的工艺技术。
Fabrication of high-aspect-ratio and high-density X-ray transmission grating
大高宽比、高线密度X射线透射光栅的制作
Using the same fabrication processes,the X-ray transmission grating,which has the line density of 3333 1/mm and the thickness of 1000 nm,has been fabricated.
本文针对X射线成像波带片和光栅在X射线显微成像技术中的应用,把电子束光刻和X射线光刻技术相结合,在深入研究电子束光刻和X射线光刻工艺技术的基础之上,成功制作了最外环宽度为100 nm,厚度为700 nm和1300 nm的大高宽比X射线成像波带片,制作了线密度为3333 l/mm,厚度为1000 nm的大高宽比、高线密度X射线透射光栅。
Implementation of light-bleed effect based on shader;
基于shader实现的光线透射效果
Fabrication of high-aspect-ratio and high-density X-ray transmission grating
大高宽比、高线密度X射线透射光栅的制作
Fabrication and Study of 2000 l/mm X-Ray Self-Standing Transmission Gratings
2000l/mm X射线镂空透射光栅的制备研究
x ray photoemission diffraction
x射线光电发射衍射
X-ray fluorescent emission spectrometer
X射线荧光发射光谱仪
not transparent to X-rays or other forms of radiation.
对x光或者其他形式的射线不透明。
Physical characteristics of X-rays scattered by phantom in the transmission dose for radiotherapy
X光透射剂量中模体散射线的物理特性研究
Hourglass-shaped X-ray compound refractive lens made by back-mask exposure technology
背面曝光技术制作沙漏状X射线组合折射透镜
Optical Properties Analysis of Compound Parabolic Refractive X-ray Lenses
抛物面型X射线组合折射透镜光学性能分析
Performance of a soft x-ray splitter grating parallelism measuring system by diffraction method
衍射法X射线激光分束光栅平行度测量系统(英文)
nondiffraction X-ray spectrometer
非衍射x射线光谱仪
Grating spectrometers, used over the rangs from soft x-rays to the far infared, have enjoyed continued interest.
使用范围从软x射线到远红外线的光栅光谱仪继续受到注意。
x ray excited optical fluorescence
x射线激发光学荧光
x ray fluorescence spectroscopy
x 射线荧光光谱分析
fluorescent X - ray spectroscopy
荧光x-射线光谱分析
x ray spectrophotometer
x 射线分光光度计
gamma excited x ray fluorimeter
射线激发x光荧光仪
almost complete transparent to X-rays or other forms of radiation.
对x光或者其他形式的射线几乎完全透明。
Examination of the inner structure of optically opaque objects by x-rays or other penetrating radiation; radiology.
放射检验用X射线或其它穿透性的辐射对不透光的物体的内部构造进行的检查；放射学