In this paper,the structure for the focus deflection svs-tem of the electrostatic deflection type is studied and analyzed.
该文对静电偏转型聚焦偏转系统的结构作了分析研究。
Based on the SDS-3 E-beam lithography machine,the electrostatic deflection of the folded plate structure was used instead of the electrostatic deflection of the plate.
以SDS -3电子束曝光机为基础,用折板结构静电偏转替代直板结构静电偏转,探讨了电子束曝光机折板静电偏转场的电子轨迹与电位分布应满足的要求。
The experimental results of SDS-3 Ebeam lithography machine show that the aberrations of the electrostatic deflection are in the same order of the magnetic deflection.
由SDS-3电子束曝光机试验结果表明,复合静电偏转可以达到磁偏转相似的像差水平。
But due to the lower extraction efficiency of the SFC, on one hand, a lot of beam lost, and on other hand, outgas from the surface of the electrostatic deflector is serious because of beam hitting.
但由于SFC的引出效率比较低,只有30％左右,一方面损失了大量束流,另一方面许多束流损失在引出静电偏转板上,造成了大量出气,破坏了真空,难以维持长期大束流运行。
The calculation method in computer aided design(CAD) of deflection system is introduced.
在偏转系统的计算机辅助设计中应用商用电磁场计算软件ＥＭＡＳ（ＥｌｅｃｔｒｏｎｉｃｍａｇｎｅｔｉｃｆｉｅｌｄＡｎａｌｙｓｉｓＳｙｓｔｅｍ）与表面磁荷法相结合计算空间任意一点磁场、用龙格库塔法计算电子轨迹、用局部优化法进行偏转系统优化的计算方法。
The paper presents the constitution features and experimental results of deflection system of the DY-5 electron beam exposure machine.
本文将重点介绍ＤＹ－５型电子束曝光机的偏转系统的构成、特点及结果。
The deflection system of DX 3 has been rebuilt with SDS 2 system.
介绍了以DX - 3扫描电镜为基础 ,利用SDS - 2电子束扫描系统改装其偏转系统。
A double-lens-double-deflector system has been designed.
并推导了双通道复合系统的偏转场计算公式,设计了一个双静电偏转场双物镜复合系统。
Some suggestions to improve uniformity of the periphery of electrostatic deflection field are outlined in the discussion.
讨论中提出了一些改善静电偏转场边缘区均匀性的建议。
Analysis of Disturbing Torque in Electrostatic Field Caused by Rotor Radial Disbalance in ESG
静电陀螺转子径向偏心干扰力矩分析
Research on Deflection Circuit S-Correction in Big Deflection Angles CRTs;
大偏转角度CRT偏转电路S校正的研究
radial beam tube
径向偏转电子射线管
transistor vertical deflection circuit
晶体管垂直偏转电路
transformer-fed deflector coil
变压器馈电偏转线圈
an instrument for obtaining a mass spectrum by deflecting ions into a thin slit and measuring the ion current with an electrometer.
通过把离子偏转到狭长切口并用静电计测量离子流获取光谱的仪器。
Approach to Static Load Test Method of Clamping Piece Type Flat Anchorage with Deflection Angle
有偏转角度夹片式扁锚静载试验方法探讨
Effect of the Electrostatic Property in the Electrospinning of Polyvinylidene Fluoride Solutionn
静电性能对电纺聚偏氟乙烯纤维的影响
Scale factor and bias calibration of electrostatic accelerometer
静电加速度计标度因数和零偏误差标定
Tentative Design for Test Table of ESG
静电陀螺测试转台电气部分方案设计
Defection distortion test chart of transparencies for television
GB/T6996.14-1986透射式电视偏转畸变测试图
horizontaldischarge tube
水平偏转放电锯齿波形成管
The calculation of the spatial distribution of the magnetic field in the deflection coils of EM
电镜用偏转线圈空间磁场分布的计算
A Computer Aided Design for the Scanning Deflection System of EM
电镜扫描偏转系统的计算机辅助设计
Analysis of Gaseous Film for Static Balance Measurement of ESG Rotator with Compressed Air
静电陀螺转子气浮法静平衡检测的气膜分析
The pointer oscillates for some time before setting down to a steady deflection.
指针会振荡一段时间然后才静止到一个稳定的偏转角。