Study on line-profiles of variable line-space plane gratings with holographic recording;
全息平面变间距光栅刻线弯曲程度分析
Analytical method of the diffraction characteristic of ruled grating based on profile fitting function;
基于槽形函数拟合的刻划光栅衍射特性分析方法
Numerical analysis and measurement of stray light from UV ruled gratings
紫外平面刻划光栅杂散光数值分析及测试
Realization of Ambient Temperature Monitored of Grating Ruling Engine Based on PLC
基于PLC的光栅刻划机环境温度监控的实现
raster scan electron beam lithography
光栅扫描电子束光刻
Manufacture for light splitting grating in optical disk based on precision ruling and thin film deposition
基于精密刻划及薄膜沉积技术的光盘分束光栅研制
raster scan electron beam system
光栅扫描电子束光刻系统
Alignment System with Multi-Grating Mark for Lithographic Apparatus
用于光刻装置的多光栅标记对准系统
Profile Control and Detection of Holographically Recorded Photoresist Grating Masks;
光刻胶全息光栅掩模槽形的控制和检测
Research on the Interference Nanosecond Laser Ablation of Micro-grating Structures on the Silicon Surface
硅表面微光栅结构的纳秒激光干涉刻蚀研究
Corrugated High-order Bragg Grating on Silicon-on-insulator Ridge Waveguides Fabricated by Photolithography
高阶布拉格光栅在SOI脊形波导上的光刻制作
Fabrication of Micro-grating Structures by Nanosecond Laser Ablation of Chrome Film on Glass Substrate
纳秒激光刻蚀玻璃基质铬薄膜直写微光栅结构
Simulation and experiments of monitoring curves on development of holographically recorded photoresist gratings
光刻胶全息光栅显影监测的模拟与实验
Multilayer Dielectric Gratings: In-situ Monitoring of Duty Cycle of photoresist Mask and Ion-Beam-Etched Groove Depth;
介质膜光栅：光刻胶掩模占宽比和离子束刻蚀槽深的监控
A new method fir producing holographic gratings for high temperature is developed in this paper.
本文提出了应用双镀层光刻法制作高温全息光栅的新工艺。
Analyze of the Reflectivity Spectrum of Phase-shifted Fiber Bragg Grating Inscribed in PMF;
刻在保偏光纤上的相移布拉格光栅反射谱的分析
Etched-Diffraction-Grating Based Planar Optical Multi/Demultiplexer on Silicon-On-Insulator;
基于绝缘体上的硅材料的刻蚀光栅式分波合波器研究
Research on Several Design Problems of Deep-Etched Concave Diffraction Grating Wavelength Division Multiplexers;
深刻蚀凹面衍射光栅波分复用器若干设计问题的研究
Vacuum-ultraviolet Blazed Silicon Gratings Anisotropically Wet-etched by a Native-oxide Mask
利用天然氧化层掩模的真空紫外硅闪耀光栅的湿法刻蚀制作
double-beam grating spectrophotometer
双光束光栅分光光度计