The technology of high-precision 3-D surface topography analyzing based on scanning white-light interferometry is described in details.
白光扫描干涉法在三维表面形貌的测量中有着广阔的应用前景。
Scanning white-light interferometry for 3D surface topography has a wide application.
本文在系统地分析和总结了各种三维表面形貌测量方法,比较了各种方法的优缺点,重点对使用白光扫描干涉法高精度测量三维表面形貌技术进行了研究。
scanned IR interferometry
扫描红外干涉测量法
Contact Surface Profilometer Based on Scanning White Light Interference Method;
基于扫描白光干涉法的接触式轮廓测量仪
The Study of Wavelength Scanning Interference Testing Method for Aspherical Surface;
非球面波长扫描干涉测试方法的研究
Measuring Mathord Research of Scanning Mirror Swing Altitute for Swing Infrared Earth Sensor;
红外地球敏感器扫描镜摆幅测量方法研究
Measuring thickness of epitaxial layers of gallium arsenide by infrared interference
GB/T8758-1988砷化镓外延层厚度红外干涉测量方法
Research on Measurement of 3D Surface Topography Based on Scanning White-light Interferometry;
白光扫描干涉三维表面形貌测量技术的研究
A Research on White-light Interferometric Measurement System of Surface Topography Based on the Scanning Positioning Stage;
基于垂直扫描工作台的白光干涉表面形貌测量系统研究
Research on the Principle of Spectrum-dispersion-line Scanning Nanometer Surface 3-D Interferometric Measurement System
基于光谱色散线扫描的干涉型纳米表面在线测量原理与实验研究
Emulating Analysis of Calculating Methodology for Scanning Period of Infrared Imaging Instrument
对红外成像设备扫描周期测算方法的仿真分析
Determination of protocatechualdehyde in the Dan hong inje ction by TLC Scanning
薄层扫描法测定丹红注射液中原儿茶醛含量
Research on Global Collision Detection for Five-axis NC Machining Based on Sweep Plane Algorithm
基于平面扫描的五轴数控加工全局干涉检测算法研究
DSC (Differential Scanning Calorimetry)
差示扫描热量测定法
servocontrolled scanning interferometer
随动控制扫描干涉仪
Measuring Kiln Temperature Based on Infrared Line-Scanning Technology
基于红外扫描技术的窑筒体温度检测
Processing method of infrared line-scan image based on Independent component analysis
基于独立分量分析的红外线列扫描图像处理方法
Fabry-Perot interferometry
法布里－珀罗干涉测量法
scanned laser infrared microscope
扫描激光红外显微镜
fast-scanning infrared microscope
快速扫描红外显微镜