This paper presented and discussed a method and its principles to characterize the modulation structure of nano- multilayers with energy dispersive X- ray( EDX) techniques.
提出并讨论了采用 X射线色散谱 ( EDX)技术表征纳米多层膜调制结构的原理和方法 ,对Ti N/ Nb N纳米多层膜的调制结构特征进行了表征 ,并与横截面透射电子显微镜 ( TEM)表征方法进行比较 。
The compositions of the coatings were analyzed by energy dispersive X-ray microanalysis system(EDS),and the morphology of the coatings was observed by scanning electron microscopy(SEM).
采用能量色散X射线谱(EDS)分析得出镀层成分,利用扫描电子显微镜(SEM)观察镀层形貌。