1)s d regions,源 漏区2)source/drain extension region,源/漏扩展区3)source and drain extension,源漏扩展区4)S/D extension,源漏延伸区5)Measure Methodology,源/漏区刻蚀6)leakage air sources,漏风源
用法和例句
Polysilicon doped heavily is introduced as solid phase diffusion source to realize ultra shallow source and drain extensions.