The surfaces were coated with low-surface-energy hydrophobic OTS molecular films to remove capillary forces and were electrically grounded to eliminate electrostatic force between them.
通过在硅微接触表面上涂覆低表面能的憎水性OTS膜以除去接触面间的表面张力,把两表面均接地以除去接触面间的静电力,研究了仅有范德华力作用时硅微结构接触表面的粘附。