According to the character of VO2 taking phase transition at near 68 ℃,using the mixture gas of high pure hydrogen and high pure nitrogen as precursor,VO2-xNy thin films are synthesized at low temperature by microwave plasma enhanced procesesses using V2O5 as molecular precursors through coating film on glass slice.
选用V2O5为前驱物,通过在玻璃片上镀膜,利用高纯氢和高纯氮作为气源,采用微波等离子体增强法,在低温条件下合成了氮杂二氧化钒(VO2-xNy)样品。
In the thesis, carbon nano-tubes (CNTs) are synthesized by microwave plasma enhance chemical vapor deposition (MPCVD).
本论文利用微波等离子体增强化学气相沉积(MPCVD)法制备了碳纳米管薄膜，并以此为阴极开发了二极型七段FED数码管和点阵式FED显示屏的驱动电路。