The fabrication of the pump cavity and one-way valve by anisotropic etching a.
针对微泵的关键结构——复合驱动膜,探索了一种Si/SiO2/Ti/Au/PZT/Cr/Au多层驱动膜结构制备方法,解决了在硅基底上制备PZT薄膜的问题,同时探讨并解决了硅各向异性刻蚀微泵的微驱动腔、单向阀的工艺问题,并通过SEM照片对V型阀和多层驱动膜进行了表征。
The problems of fabrication for the pump cavity and one-way valve fabricated by anisotropic etching are investigated and.
针对微驱动器的关键结构驱动膜,探索了Si/SiO2/Ti/Au/PZT/Cr/Au多层驱动膜结构制备方法,解决了在硅基底上制备PZT薄膜的问题,同时详细探讨了硅各向异性刻蚀微驱动器的关键部件驱动腔、单向阀的工艺,解决了集成制作的V型阀微驱动器的关键工艺问题,并通过SEM照片对V型阀和多层驱动膜进行了表征。
Through studying the process of ICP and anisotropic etching associate with bonding technology, ideal silicon tips and suitable process conditions were obtained.
隧道硅尖的制备是微机械隧道传感器制作的一个重要组成部分 ,通过对ICP刻蚀和湿法各向异性刻蚀工艺制备硅尖实验的研究 ,得到了合适的工艺条件以及较理想的硅
XeF2 can react directly with silicon spontaneously without ionization required, so it can be used as the gas for isotropic dry etching of silicon.
XeF2不需要任何电离作用,与硅可发生自发反应,可用作对硅各向同性干法刻蚀。
Micromachining of sensors——Computer simulation of the Anisotropic etching course;
传感器的微机械加工中各向异性腐蚀过程的计算机模拟
The corner undercutting was quite serious because of the anisotropic etching on crystalline Si(100)wafer.
在进行Si(100)台面腐蚀时,由于硅的各向异性腐蚀特性,凸角处呈现严重切削现象。
New type of magnetic sensitivity transistor is based on SOI,whose design principle and process are expatiated,and whose recombination region is set by anisotropic etching technology in MEMS.
构成新型磁敏三极管的复合区采用MEMS中的各向异性腐蚀技术进行设置,给出了这种复合区的复合机理。
It has advantages of sample structure, low damage and anisotropic etching.
该装置具有结构简单，低损伤和各向异性刻蚀的优点。
Study on the Wet Anisotropic Etching Characteristics of (100)、(110) Silicon;
（100）、（110）硅片湿法各向异性腐蚀特性研究
Therefore, plasma etching anisotropy can be improved by increasing rf frequency or rf-bias power.
因此,等离子体刻蚀的各向异性可以通过增加射频频率和射频功率来改善。
Simulation of Anisotropic Etching for Micro Structure of Crystal Silicon Based on CA Model;
基于CA模型的单晶硅各向异性腐蚀微观模拟
The Computer Micro-Simulation of Silicon Crystal Anisotropic Etching;
单晶硅各向异性腐蚀的计算机微观模拟
Simulation of Silicon Anisotropic Etching Using Cellular Automata Method;
用元胞自动机方法模拟硅的各向异性腐蚀
Research on Anisotropic Etching Processing Technique with Wet Method on Silicon Devices
硅器件湿法各向异性腐蚀加工技术研究
isotropy and anisotropy
各向同性和各向异性
tical anisotropy
光学的各向异性;光学各向同性;光学异向性
elasticity of anisotropics
各向异性体弹性力学
electrooptical anisotropy
电学、光学各向异性现象
material with anisotropic thermal expansion
各向异性热膨胀材料
intrinsic anisotropy
(纤维的) 内在各向异性
heterogeneous anisotropic media
非均质各向异性介质
orthotropic deck structure
正交各向异性桥面结构
anisotropic dielectric waveguide
各向异性电介质波导
anisotropy dipmeter
各向异性地层倾角仪
infrared absorption anisotropy
红外[线]吸收[的]各向异性