The processes of nickel soft contact microprobes produced by UV-LIGA were introduced.
试验结果表明:采用工艺条件优选的UV-LIGA技术,如前烘60℃,120 min,90℃,120 min;较大曝光剂量;后烘65℃,10min,95℃,45 min;匀胶后静置、随炉冷却和超声辅助显影等辅助措施,所制备出的柔性接触探针(主体总长4 mm,宽80μm,高100μm;弹簧处高宽比为5(100μm:20μm))尺寸精度高;三角锥状针尖曲率半径小于5μm;缺陷少,形貌质量高。